Surface micromachining by sacrificial aluminium etching

Journal of Micromechanics and Microengineering 1996 / 12 Vol. 6; Iss. 4

Surface micromachining by sacrificial aluminium etching

Westberg, David, Paul, Oliver, Andersson, Gert I, Baltes, Henry
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Volume:
6
Language:
english
Journal:
Journal of Micromechanics and Microengineering
DOI:
10.1088/0960-1317/6/4/004
Date:
December, 1996
File:
PDF, 778 KB
english, 1996
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