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Mechanical and corrosive characteristics of Ta/TaN multilayer coatings
Ma, Guojia, Lin, Guoqiang, Gong, Shuili, Liu, Xing, Sun, Gang, Wu, HongchenVolume:
89
Language:
english
Journal:
Vacuum
DOI:
10.1016/j.vacuum.2012.05.024
Date:
March, 2013
File:
PDF, 867 KB
english, 2013