Magnetic field effects on coating deposition rate and surface morphology coatings using magnetron sputtering
Yang, Yu-Sen, Huang, WesleyVolume:
19
Language:
english
Journal:
Smart Materials and Structures
DOI:
10.1088/0964-1726/19/12/124003
Date:
December, 2010
File:
PDF, 2.44 MB
english, 2010