Space-resolved velocity and flux distributions of sputtered...

Plasma Sources Science and Technology 2011 / 08 Vol. 20; Iss. 4

Space-resolved velocity and flux distributions of sputtered Ti atoms in a planar circular magnetron discharge

Vitelaru, C, de Poucques, L, Minea, T M, Popa, G
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Volume:
20
Language:
english
Journal:
Plasma Sources Science and Technology
DOI:
10.1088/0963-0252/20/4/045020
Date:
August, 2011
File:
PDF, 856 KB
english, 2011
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