Target voltage behaviour of a vanadium-oxide thin film...

Chinese Physics B 2011 / 03 Vol. 20; Iss. 3

Target voltage behaviour of a vanadium-oxide thin film during reactive magnetron sputtering

Wang, Tao, Jiang, Ya-Dong, Yu, He, Wu, Zhi-Ming, Zhao, He-Nan
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Volume:
20
Language:
english
Journal:
Chinese Physics B
DOI:
10.1088/1674-1056/20/3/038101
Date:
March, 2011
File:
PDF, 461 KB
english, 2011
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