Study on Effects of Hydrogen Flow Rates on the Properties of ZnO Thin Film Deposited by Facing Targets Sputtering System
Kim, Hye Ran, Wen, Long, Jin, Su Bong, Choi, Yoon Seok, Choi, In Sik, Hori, Masaru, Han, Jeon GeonVolume:
52
Language:
english
Journal:
Japanese Journal of Applied Physics
DOI:
10.7567/JJAP.52.11NB01
Date:
November, 2013
File:
PDF, 1.39 MB
english, 2013