Out-of-plane MEMS-based mechanical airflow sensor...

Sensors and Actuators A: Physical 2014 / 2 Vol. 206

Out-of-plane MEMS-based mechanical airflow sensor co-integrated in SOI CMOS technology

André, Nicolas, Rue, Bertrand, Scheen, Gilles, Flandre, Denis, Francis, Laurent A., Raskin, Jean-Pierre
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Volume:
206
Language:
english
Journal:
Sensors and Actuators A: Physical
DOI:
10.1016/j.sna.2013.11.017
Date:
February, 2014
File:
PDF, 1.89 MB
english, 2014
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