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Electrical and structural properties of semi-insulating polycrystalline silicon thin films
Lombardo, S., Campisano, S. U., Baroetto, F.Volume:
47
Language:
english
Journal:
Physical Review B
DOI:
10.1103/PhysRevB.47.13561
Date:
May, 1993
File:
PDF, 533 KB
english, 1993