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3D numerical simulation of gas heating effects in a magnetron sputter deposition system
Ekpe, Samuel D, Dew, Steven KVolume:
39
Language:
english
Journal:
Journal of Physics D: Applied Physics
DOI:
10.1088/0022-3727/39/7/012
Date:
April, 2006
File:
PDF, 378 KB
english, 2006