High- k Hf-based layers grown...

Nanotechnology 2010 / 03 Vol. 21; Iss. 9

High- k Hf-based layers grown by RF magnetron sputtering

Khomenkova, L, Dufour, C, Coulon, P-E, Bonafos, C, Gourbilleau, F
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Volume:
21
Language:
english
Journal:
Nanotechnology
DOI:
10.1088/0957-4484/21/9/095704
Date:
March, 2010
File:
PDF, 2.84 MB
english, 2010
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