Study of dc micro-discharge arrays made in silicon using...

Journal of Physics D Applied Physics 2012 / 07 Vol. 45; Iss. 28

Study of dc micro-discharge arrays made in silicon using CMOS compatible technology

Kulsreshath, M K, Schwaederle, L, Overzet, L J, Lefaucheux, P, Ladroue, J, Tillocher, T, Aubry, O, Woytasik, M, Schelcher, G, Dussart, R
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Volume:
45
Language:
english
Journal:
Journal of Physics D: Applied Physics
DOI:
10.1088/0022-3727/45/28/285202
Date:
July, 2012
File:
PDF, 1.49 MB
english, 2012
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