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SPIE Proceedings [SPIE Seventh International Conference on Thin Film Physics and Applications - Shanghai, China (Friday 24 September 2010)] Seventh International Conference on Thin Film Physics and Applications - Fabrication of nanopores utilizing SiC/Si(001) heteroepitaxial growth on SOI substrates: nanopore density control
Yahaya, Hafizal, Ikoma, Yoshifumi, Kuriyama, Keiji, Motooka, Teruaki, Chu, Junhao, Wang, ZhanshanVolume:
7995
Year:
2011
Language:
english
DOI:
10.1117/12.888388
File:
PDF, 6.69 MB
english, 2011