Multilevel diffractive elements in SiO2 by electron beam...

Multilevel diffractive elements in SiO2 by electron beam lithography and proportional etching with analogue negative resist

Laakkonen, Pasi, Lautanen, Jari, Kettunen, Ville, Turunen, Jari, Schirmer, Matthias
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Volume:
46
Language:
english
Journal:
Journal of Modern Optics
DOI:
10.1080/09500349908231336
Date:
July, 1999
File:
PDF, 1.02 MB
english, 1999
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