High-precision nanoscale length measurement

Nanotechnologies in Russia 2013 / 07 Vol. 8; Iss. 7-8

High-precision nanoscale length measurement

Sheglov, D. V., Kosolobov, S. S., Fedina, L. I., Rodyakina, E. E., Gutakovskii, A. K., Sitnikov, S. V., Kozhukhov, A. S., Zagarskikh, S. A., Kopytov, V. V., Evgrafov, V. I., Shuvalov, G. V., Matveichu
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Volume:
8
Language:
english
Journal:
Nanotechnologies in Russia
DOI:
10.1134/S1995078013040162
Date:
July, 2013
File:
PDF, 1.14 MB
english, 2013
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