![](/img/cover-not-exists.png)
SPIE Proceedings [SPIE SPIE MOEMS-MEMS - San Francisco, California, USA (Saturday 2 February 2013)] Advanced Fabrication Technologies for Micro/Nano Optics and Photonics VI - Towards high-rate fabrication of photonic devices utilizing a combination of roll-to-roll compatible imprint lithography and ink jet printing methods
Lin, Xiaohui, Ling, Tao, Subbaraman, Harish, Guo, L. Jay, Chen, Ray T., von Freymann, Georg, Schoenfeld, Winston V., Rumpf, Raymond C.Volume:
8613
Year:
2013
Language:
english
DOI:
10.1117/12.2005132
File:
PDF, 599 KB
english, 2013