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SPIE Proceedings [SPIE SPIE MOEMS-MEMS - San Francisco, California, USA (Saturday 2 February 2013)] Advanced Fabrication Technologies for Micro/Nano Optics and Photonics VI - Wire grid polarizers fabricated by low angle deposition

Watts, M. P. C., Little, M., Egan, E., Hochbaum, A., Johns, C., Stephansen, S., von Freymann, Georg, Schoenfeld, Winston V., Rumpf, Raymond C.
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Volume:
8613
Year:
2013
Language:
english
DOI:
10.1117/12.2008812
File:
PDF, 1.02 MB
english, 2013
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