Effect of silane flow rate on structural, electrical and optical properties of silicon thin films grown by VHF PECVD technique
Gope, Jhuma, Kumar, Sushil, Sudhakar, S., Rauthan, C.M.S., Srivastava, P.C.Volume:
141
Language:
english
Journal:
Materials Chemistry and Physics
DOI:
10.1016/j.matchemphys.2013.04.028
Date:
August, 2013
File:
PDF, 1023 KB
english, 2013