Fundamental investigations of capacitive radio frequency...

Plasma Physics and Controlled Fusion 2012 / 12 Vol. 54; Iss. 12

Fundamental investigations of capacitive radio frequency plasmas: simulations and experiments

Donkó, Z, Schulze, J, Czarnetzki, U, Derzsi, A, Hartmann, P, Korolov, I, Schüngel, E
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Volume:
54
Language:
english
Journal:
Plasma Physics and Controlled Fusion
DOI:
10.1088/0741-3335/54/12/124003
Date:
December, 2012
File:
PDF, 4.12 MB
english, 2012
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