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Sheath-to-sheath transport of dust particles in a capacitively coupled discharge
Iwashita, Shinya, Uchida, Giichiro, Schulze, Julian, Schüngel, Edmund, Hartmann, Peter, Shiratani, Masaharu, Donkó, Zoltán, Czarnetzki, UweVolume:
21
Language:
english
Journal:
Plasma Sources Science and Technology
DOI:
10.1088/0963-0252/21/3/032001
Date:
June, 2012
File:
PDF, 400 KB
english, 2012