Investigation of ionized metal flux fraction in HiPIMS...

Surface and Coatings Technology 2014 / 01 Vol. 238

Investigation of ionized metal flux fraction in HiPIMS discharges with Ti and Ni targets

Kubart, Tomáš, Čada, Martin, Lundin, Daniel, Hubička, Zdeněk
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Volume:
238
Language:
english
Journal:
Surface and Coatings Technology
DOI:
10.1016/j.surfcoat.2013.10.064
Date:
January, 2014
File:
PDF, 1.48 MB
english, 2014
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