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Planarization optimization of RF-MEMS switches with a gold membrane
Villeneuve, C, Pons, P, Puyal, V, Plana, RVolume:
20
Language:
english
Journal:
Journal of Micromechanics and Microengineering
DOI:
10.1088/0960-1317/20/6/064013
Date:
June, 2010
File:
PDF, 667 KB
english, 2010