Study of gradient stress in bimaterial cantilever...

Study of gradient stress in bimaterial cantilever structures for infrared applications

Huang, Shusen, Zhang, Xin
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Volume:
17
Language:
english
Journal:
Journal of Micromechanics and Microengineering
DOI:
10.1088/0960-1317/17/7/001
Date:
July, 2007
File:
PDF, 265 KB
english, 2007
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