Study of gradient stress in bimaterial cantilever structures for infrared applications
Huang, Shusen, Zhang, XinVolume:
17
Language:
english
Journal:
Journal of Micromechanics and Microengineering
DOI:
10.1088/0960-1317/17/7/001
Date:
July, 2007
File:
PDF, 265 KB
english, 2007