Sсandium(III) Beta-diketonate Derivatives as Precursors for...

Physics Procedia 2013 Vol. 46

Sсandium(III) Beta-diketonate Derivatives as Precursors for Oxide Film Deposition by CVD

Zherikova, Kseniya V., Zelenina, Ludmila N., Chusova, Tamara P., Morozova, Natalia B., Trubin, Sergey V., Vikulova, Eugeniia S.
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Volume:
46
Year:
2013
Language:
english
Journal:
Physics Procedia
DOI:
10.1016/j.phpro.2013.07.068
File:
PDF, 4.32 MB
english, 2013
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