Flexures for large stroke electrostatic actuation in MEMS

Journal of Micromechanics and Microengineering 2014 / 01 Vol. 24; Iss. 1

Flexures for large stroke electrostatic actuation in MEMS

Krijnen, B, Brouwer, D M
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Volume:
24
Language:
english
Journal:
Journal of Micromechanics and Microengineering
DOI:
10.1088/0960-1317/24/1/015006
Date:
January, 2014
File:
PDF, 1.06 MB
english, 2014
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