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Effects of nitrogen gas ratio on magnetron sputtering deposited boron nitride films
Wang, Chuanbin, Luo, Xiaoshuang, Zhang, Song, Shen, Qiang, Zhang, LianmengVolume:
103
Language:
english
Journal:
Vacuum
DOI:
10.1016/j.vacuum.2013.12.009
Date:
May, 2014
File:
PDF, 1.02 MB
english, 2014