Langmuir probe measurements in an inductively coupled...

Physical Review E 1997 / 3 Vol. 55; Iss. 3

Langmuir probe measurements in an inductively coupled plasma source

Schwabedissen, A., Benck, E. C., Roberts, J. R.
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Volume:
55
Language:
english
Journal:
Physical Review E
DOI:
10.1103/PhysRevE.55.3450
Date:
March, 1997
File:
PDF, 199 KB
english, 1997
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