On the anisotropy and thermalization of the metal sputtered...

EPL (Europhysics Letters) 2008 / 04 Vol. 82; Iss. 1

On the anisotropy and thermalization of the metal sputtered atoms in a low-pressure magnetron discharge

Poucques, L. de, Vitelaru, C., Minea, T. M., Bretagne, J., Popa, G.
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Volume:
82
Language:
english
Journal:
EPL (Europhysics Letters)
DOI:
10.1209/0295-5075/82/15002
Date:
April, 2008
File:
PDF, 293 KB
english, 2008
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