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A CMOS-compatible high aspect ratio silicon-on-glass in-plane micro-accelerometer
Chae, Junseok, Kulah, Haluk, Najafi, KhalilVolume:
15
Language:
english
Journal:
Journal of Micromechanics and Microengineering
DOI:
10.1088/0960-1317/15/2/013
Date:
February, 2005
File:
PDF, 1.74 MB
english, 2005