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SPIE Proceedings [SPIE Optical Systems Design - St. Etienne, France (Tuesday 30 September 2003)] Advances in Optical Thin Films - Fully automated inline sputtering for optical coatings
List, Matthias, Melde, Christian, Struempfel, Johannes, Illgen, Claus, Amra, Claude, Kaiser, Norbert, Macleod, H. AngusVolume:
5250
Year:
2004
Language:
english
DOI:
10.1117/12.512944
File:
PDF, 1.18 MB
english, 2004