Study on the influence of nitrogen on titanium nitride in a...

Journal of Physics D Applied Physics 2008 / 10 Vol. 41; Iss. 19

Study on the influence of nitrogen on titanium nitride in a dc post magnetron sputtering plasma system

Borah, Sankar Moni, Bailung, Heremba, Pal, Arup Ratan, Chutia, Joyanti
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Volume:
41
Language:
english
Journal:
Journal of Physics D: Applied Physics
DOI:
10.1088/0022-3727/41/19/195205
Date:
October, 2008
File:
PDF, 534 KB
english, 2008
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