Negative corona discharge: application to nanoparticle detection in rf reactors
Abolmasov, S N, Kroely, L, Roca i Cabarrocas, PVolume:
18
Language:
english
Journal:
Plasma Sources Science and Technology
DOI:
10.1088/0963-0252/18/1/015005
Date:
February, 2009
File:
PDF, 578 KB
english, 2009