A method for tapered deep reactive ion etching using a modified Bosch process
Roxhed, Niclas, Griss, Patrick, Stemme, GöranVolume:
17
Language:
english
Journal:
Journal of Micromechanics and Microengineering
DOI:
10.1088/0960-1317/17/5/031
Date:
May, 2007
File:
PDF, 289 KB
english, 2007