Deposition of mechanically hard amorphous carbon nitride...

Diamond and Related Materials 2008 / 4 Vol. 17; Iss. 4-5

Deposition of mechanically hard amorphous carbon nitride films with high [N]/([N]+[C]) ratio

Ito, Haruhiko, Kanda, Kazuhiro, Saitoh, Hidetoshi
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Volume:
17
Language:
english
Journal:
Diamond and Related Materials
DOI:
10.1016/j.diamond.2007.08.013
Date:
April, 2008
File:
PDF, 237 KB
english, 2008
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