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Tuning bond contents in BâCâN films via temperature and bias voltage within RF magnetron sputtering
Zhuang, Chunqiang, Zhao, Jijun, Jia, Fuchao, Guan, Changyu, Wu, Zhanling, Bai, Yizhen, Jiang, XinVolume:
204
Language:
english
Journal:
Surface and Coatings Technology
DOI:
10.1016/j.surfcoat.2009.09.031
Date:
December, 2009
File:
PDF, 425 KB
english, 2009