SPIE Proceedings [SPIE Photonics West '97 - San Jose, CA (Saturday 8 February 1997)] Miniaturized Systems with Micro-Optics and Micromechanics II - E-beam lithography: an efficient tool for the fabrication of diffractive and micro-optical elements
Kley, Ernst-Bernhard, Schnabel, Bernd, Zeitner, Uwe D., Motamedi, M. Edward, Hornbeck, Larry J., Pister, Kristofer S. J.Volume:
3008
Year:
1997
Language:
english
DOI:
10.1117/12.271417
File:
PDF, 890 KB
english, 1997