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SPIE Proceedings [SPIE Photonics West '97 - San Jose, CA (Saturday 8 February 1997)] Miniaturized Systems with Micro-Optics and Micromechanics II - Micro-optic fabrication using one-level gray-tone lithography
Reimer, Klaus, Quenzer, Hans Joachim, Juerss, M., Wagner, Bernd, Motamedi, M. Edward, Hornbeck, Larry J., Pister, Kristofer S. J.Volume:
3008
Year:
1997
Language:
english
DOI:
10.1117/12.271425
File:
PDF, 1.19 MB
english, 1997