Review of vacuum packaging and maintenance of MEMS and the...

Journal of Micro/Nanolithography MEMS and MOEMS 2009 / 07 Vol. 8; Iss. 3

Review of vacuum packaging and maintenance of MEMS and the use of getters therein

Kullberg, Richard C.
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Volume:
8
Language:
english
Journal:
Journal of Micro/Nanolithography, MEMS, and MOEMS
DOI:
10.1117/1.3158064
Date:
July, 2009
File:
PDF, 573 KB
english, 2009
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