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Surface energy guided sub-10 nm hierarchy structures fabrication by direct e-beam etching
Neng, Wan, Jun, Xu, Tao, Xu, Martini, Matteo, Li-tao, Sun, Jun, Sun, Yi-long, ZhouVolume:
3
Year:
2013
Language:
english
Journal:
RSC Advances
DOI:
10.1039/C3RA42370K
File:
PDF, 904 KB
english, 2013