Microscopic Thickness Uniformity and Time-Dependent...

Japanese Journal of Applied Physics 2013 / 03 Vol. 52; Iss. 3R

Microscopic Thickness Uniformity and Time-Dependent Dielectric Breakdown Lifetime Dispersion of Thermally Grown Ultrathin SiO 2 Film on Atomically Flat Si Surface

Hasunuma, Ryu, Hayashi, Yusuke, Ota, Masahiro, Yamabe, Kikuo
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Volume:
52
Language:
english
Journal:
Japanese Journal of Applied Physics
DOI:
10.7567/JJAP.52.031301
Date:
March, 2013
File:
PDF, 1.01 MB
english, 2013
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