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SPIE Proceedings [SPIE SPIE OPTO - San Francisco, California, USA (Saturday 2 February 2013)] High Contrast Metastructures II - High contrast gratings for high-precision metrology
Kroker, Stefanie, Steiner, Stefan, Käsebier, Thomas, Kley, Ernst-Bernhard, Tünnermann, Andreas, Chang-Hasnain, Connie J., Koyama, Fumio, Willner, Alan E., Zhou, WeiminVolume:
8633
Year:
2013
Language:
english
DOI:
10.1117/12.2006074
File:
PDF, 641 KB
english, 2013