[IEEE 2007 IEEE 20th International Conference on Micro Electro Mechanical Systems (MEMS) - Hyogo, Japan (2007.1.21-2007.1.25)] 2007 IEEE 20th International Conference on Micro Electro Mechanical Systems (MEMS) - VHF CMOS-MEMS resonator monolithically integrated in a standard 0.35μm CMOS technology
Teva, J., Abadal, G., Uranga, A., Verd, J., Torres, F., L.Lopez, J., Esteve, J., Perez-Murano, F., Barniol, N.Year:
2007
Language:
english
DOI:
10.1109/MEMSYS.2007.4433091
File:
PDF, 1.82 MB
english, 2007