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Functional room temperature metal (Al or Pd)‐ZrO 2 (smooth or porous surface)‐Si MOS capacitor O 2 sensor
Teng Soo, Mun, Yew Cheon, Kuan, Fauzi Mohd Noor, AhmadVolume:
28
Language:
english
Journal:
Microelectronics International
DOI:
10.1108/13565361111097119
Date:
January, 2011
File:
PDF, 329 KB
english, 2011