A New Method of Line Plasma Production by Microwave in a...

Applied Physics Express 2009 / 12 Vol. 2; Iss. 12

A New Method of Line Plasma Production by Microwave in a Narrowed Rectangular Waveguide

Kimura, Yasuhito, Kawaguchi, Hideki, Kagami, Shin, Furukawa, Masakazu, Shindo, Haruo
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Volume:
2
Language:
english
Journal:
Applied Physics Express
DOI:
10.1143/APEX.2.126002
Date:
December, 2009
File:
PDF, 192 KB
english, 2009
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