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Film bulk acoustic resonator pressure sensor with self temperature reference
He, X L, Garcia-Gancedo, L, Jin, P C, Zhou, J, Wang, W B, Dong, S R, Luo, J K, Flewitt, A J, Milne, W IVolume:
22
Language:
english
Journal:
Journal of Micromechanics and Microengineering
DOI:
10.1088/0960-1317/22/12/125005
Date:
December, 2012
File:
PDF, 824 KB
english, 2012