X-ray reflectivity analysis on initial stage of...

Diamond and Related Materials 2013 / 09 Vol. 38

X-ray reflectivity analysis on initial stage of diamond-like carbon film deposition on Si substrate by RF plasma CVD and on removal of the sub-surface layer by oxygen plasma etching

Harigai, Toru, Yasuoka, Yuki, Nitta, Noriko, Furuta, Hiroshi, Hatta, Akimitsu
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Volume:
38
Language:
english
Journal:
Diamond and Related Materials
DOI:
10.1016/j.diamond.2013.06.004
Date:
September, 2013
File:
PDF, 563 KB
english, 2013
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