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Thermodynamic Analysis of Various Types of Hydride Vapor Phase Epitaxy System for High-Speed Growth of InN
Kikuchi, Jun, Nishizawa, Yuuki, Murakami, Hisashi, Kumagai, Yoshinao, Koukitu, AkinoriVolume:
45
Language:
english
Journal:
Japanese Journal of Applied Physics
DOI:
10.1143/JJAP.45.L1203
Date:
November, 2006
File:
PDF, 114 KB
english, 2006