A hybrid, one-dimensional model of capacitively coupled...

Journal of Physics D Applied Physics 2008 / 11 Vol. 41; Iss. 22

A hybrid, one-dimensional model of capacitively coupled radio-frequency discharges

Heil, Brian G, Brinkmann, Ralf Peter, Czarnetzki, Uwe
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Volume:
41
Language:
english
Journal:
Journal of Physics D: Applied Physics
DOI:
10.1088/0022-3727/41/22/225208
Date:
November, 2008
File:
PDF, 593 KB
english, 2008
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