Different modes of electron heating in dual-frequency capacitively coupled radio frequency discharges
Schulze, J, Donkó, Z, Luggenhölscher, D, Czarnetzki, UVolume:
18
Language:
english
Journal:
Plasma Sources Science and Technology
DOI:
10.1088/0963-0252/18/3/034011
Date:
August, 2009
File:
PDF, 1.43 MB
english, 2009