Macro pore and pillar array formation in silicon by...

Physica Scripta 2006 / 09 Vol. T126

Macro pore and pillar array formation in silicon by electrochemical etching

Linnros, Jan, Badel, Xavier, Kleimann, Pascal
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Volume:
T126
Language:
english
Journal:
Physica Scripta
DOI:
10.1088/0031-8949/2006/T126/017
Date:
September, 2006
File:
PDF, 1.16 MB
english, 2006
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