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Characteristics of internal inductively coupled plasma with a ferrite module
Lim, Jong Hyeuk, Kim, Kyong Nam, Gwon, Gwang Ho, Hong, Seng Pyo, Kim, Seok Hwan, Yeom, Geun YoungVolume:
43
Language:
english
Journal:
Journal of Physics D: Applied Physics
DOI:
10.1088/0022-3727/43/9/095202
Date:
March, 2010
File:
PDF, 513 KB
english, 2010